NANOscientific Community - Connect and Innovate in Nanoscience

overview

speakers

program

location

Back to List

Contributed Speaker

Dr. Soeren Hommel

Infineon Technologies AG, FE QM FA MUC 6, Neubiberg, Germany

E-mail

Soeren.Hommel@infineon.com

Scanning Microwave Impedance Spectroscopy Grids for Failure Analysis and Device Characterization

Dr. Soeren Hommel

Infineon Technologies AG

Reliable 2d dopant profiling, resolved on a nanoscale, is of major importance for failure analysis as a well as technology development and process monitoring.

Several methods such as SSRM, calibrated SCM and related scanning probe techniques, claim to reveal the dopant type and perform quantitative dopant concentration measurements with an accuracy of at least on order of magnitude. However, many approaches show weaknesses when the results are challenged.

Scanning Microwave Impedance Microscopy (sMIM) and spectroscopy enable a robust way to characterize the DUT and obtain information about the dopant density relations as well as the dopant type. Furthermore, they offer present and future opportunities for highly resolved, calibrated charge carrier density measurements. Thanks to the capacitive measurement approach, this is not limited to Si, but also transferable to other semiconductor systems such as GaN and SiC.

In this talk, it will be demonstrated which information can be gained from a grid of CV curves. It will be shown how to extract depletion capacitance images from the obtained data. The advantages of depletion capacitance images in comparison to conventional SCM and sMIM will be discussed.

Finally, an outlook at the future opportunities of sMIM and the related CV spectroscopy will be given.

Fig. 1 Depletion capacitance image of the Infineon np20 sample processed from an array of CV curves obtained by scanning microwave impedance spectroscopy.

Cookie categories	Purpose of cookie
Essential Cookies	To provide you with the Service you have requested. Without these cookies, Services that you have asked for cannot be provided. For example, essential cookies enable us to remember the items you place in the shopping basket so that you can order products.
Performance Cookies (Audience measurement)	Advertising CoTo analyze the use, performance and design of our Services, detect errors and improve user experience. For example, this type of cookie enables us to understand how often you are using our Services, to recognize that you have visited our websites before and to identify which parts of our Services and which sections of our website are most popular, for example by allowing us to see which pages visitors access most frequently and how much time visitors spend on each page.okies (Behavioral advertising)
Functional Cookies (Content customization)	To deliver a better user experience, and build up customer usage patterns and profiles. For example, this type of cookie ensures that the information displayed when you use our Services (e.g. on your next visit to our website) will match up with your user preferences (such as language preferences, font size or auto-fill options).
Advertising Cookies (Behavioral advertising)	To personalize our website, deliver customized advertisements to you, or contact you directly where you have separately consented to such communications, in a way which is relevant to you and which matches your interests by, for example, using information about products you have browsed or ordered on our website.